Dynamics of Microelectromechanical Systems
Jul 2014 · Microsystems Book 17 · Springer Science & Business Media
Ebook
403
Pages
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About this ebook
Dynamics of Microelectromechanical Systems is a systematic overview of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission.
Features of this work include:
- An in-depth treatment of problems that involve reliable modeling, analysis and design,
- Analytical models with correct dependences on service dimensions,
- Cantilever based systems for nanofabrication researchers and designers, and
- Dynamics of complex spring and beam microsystems.
This material contains numerous fully-solved examples as well as many end-of-the-chapter problems. This is a follow up to the book, Mechanics of Microelectromechanical Systems, by Lobontiu and Garcia (Springer 2004), but the material in this new book is self-contained. An instructor's solution manual is available on the book's webpage at springer.com.
Dynamics of Microelectromechanical Systems is a timely text and reference for microstructural engineers, microengineers, and MEMS specialists.
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